Crystal Growth Behaviors of Silicon during Melt Growth Processes
نویسندگان
چکیده
منابع مشابه
Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing
Single crystal silicon has played the fundamental role in electronic industry since the second half of the 20th century and still remains the most widely used material. Electronic devices and integrated circuits are fabricated on single-crystal silicon wafers which are produced from silicon crystals grown primarily by the Czochralski (CZ) technique. Various defects are formed in the growing cry...
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ژورنال
عنوان ژورنال: International Journal of Photoenergy
سال: 2012
ISSN: 1110-662X,1687-529X
DOI: 10.1155/2012/169829